Process Engineer, Diffusion, Terafab
What to Expect Terafab is building a vertically integrated semiconductor factory at an unprecedented scale. The facility brings logic, memory, packaging, test, and lithography mask production under one roof, optimized for rapid iteration and maximum compute density per square foot.
Process engineering is the discipline that turns Terafab technology into reality, atom by atom. This role owns diffusion and thermal annealing across three distinct chip families: edge-inference processors, space-hardened data center SI chips for orbital satellites, and high-bandwidth memory. The engineer will develop and optimize dopant diffusion, oxidation, annealing, and related thermal processes while balancing junction profiles, dopant activation, thermal budgets, defectivity, and integration constraints across radically different product requirements.
This is a highly hands-on role requiring deep expertise in diffusion and thermal processing while collaborating closely with ion implantation, thin films, etch, CMP, metallization, photo, metrology, and integration teams in one of the most ambitious fab programs in the world.
What You'll Do Develop and qualify diffusion, oxidation, and rapid thermal annealing (RTA/RTP) processes, including dopant diffusion, junction formation, source/drain activation, channel doping, well implants, oxidation, and high-temperature anneals
Optimize critical diffusion and thermal process outcomes: dopant profiles, junction depth, sheet resistance, dopant activation, defect annealing, thermal budget management, and stress control
Own thermal/diffusion processes end-to-end: from tool installation and qualification through process window definition, recipe optimization, particle and contamination control, and HVM handoff
Qualify diffusion and thermal tools from installation to production readiness, including furnace and RTP chamber matching, uniformity control, ambient control, and stability qualification
Analyze process, dopant distribution, and device performance relationships using first-principles, physics-based approaches to understand diffusion mechanisms, transient enhanced diffusion (TED), and optimization strategies
Lead root cause analysis for profile drift, defectivity, and device param shifts; establish inline metrology and SPC control strategies; and drive systematic yield improvement
Support 24/7 manufacturing operations through rotations, on-call availability, and rapid response to critical production issues
Drive development of next-generation thermal processes and annealing techniques for advanced nodes and specialized applications
What You'll Bring Degree in Chemical Engineering, Materials Science, Electrical Engineering, Physics, or equivalent experience Hands-on diffusion, thermal processing, or implant/anneal integration experience in a semiconductor fab, with strong focus on advanced logic or memory technologies
Deep expertise in diffusion furnaces, RTP/RTA, spike anneals, and related tools
Proven track record establishing Process of Record (POR) for diffusion and annealing steps at advanced nodes
Proficiency with relevant metrology
Strong Design of Experiments skills and statistical analysis capability
Excellent collaboration skills with the ability to work proactively across ion implantation, thin films, integration, and equipment engineering teams
Passion for ambitious, vertically integrated semiconductor programs and building high-performance compute technologies
Tesla is an Equal Opportunity / Affirmative Action employer committed to diversity in the workplace. All qualified applicants will receive consideration for employment without regard to race, color, religion, sex, sexual orientation, age, national origin, disability, protected veteran status, gender identity or any other factor protected by applicable federal, state or local laws.
Tesla is also committed to working with and providing reasonable accommodations to individuals with disabilities. Please let your recruiter know if you need an accommodation at any point during the interview process.