Senior Equipment Engineer (Plasma)

Technical Expertise (Plasma Etch) Strong knowledge of plasma etch systems (RF gen, ESC, Wafer backside gas cooling system)

Understanding theory of plasma creation

Hands-on chamber full wet clean, lifter pin motor assy replacement / servicing, robot change, slip valve change …..etc

Strong capability to troubleshoot ultra low particle count and ICPMS.

Equipment Performance & Reliability Perform preventive maintenance (PM) and corrective maintenance (CM)

Troubleshoot equipment failures and minimize downtime

Ensure machines meet operational and safety standards

Manage spare parts and critical component tracking

Balance PM tool time with manufacturing

May require on-call support for critical situation

Process Support & Optimization Support production by ensuring stable processes

Work closely with process engineers to optimize tool parameters

Monitor tool performance using SPC (Statistical Process Control)

Drive improvements in yield and defect reduction

Troubleshooting & Problem Solving Conduct root cause analysis (RCA) for equipment and process issues

Apply structured problem-solving methods (e.g., 8D, Fishbone, FMEA)

Implement corrective actions and preventive actions (CAPA)

Continuous Improvement Lead or participate in productivity and cost-reduction projects

Improve Mean Time Between Failures (MTBF) and Mean Time To Repair (MTTR)

Enhance equipment efficiency and automation

Installation & Qualification Support new equipment installation, setup, and acceptance (SAT/FAT)

Perform equipment qualification and process buy-off

Collaborate with vendors for upgrades and modifications

Documentation & Reporting Maintain accurate maintenance records and technical documentation

Prepare reports on equipment performance, downtime, and improvements

Update SOPs and work instructions

Safety & Sustainability Ensure compliance with fab safety protocols and cleanroom standards

Handle high-voltage systems, vacuum systems, and hazardous gases safely

Balance equipment sustainability vs needs

Key Performance Indicators Equipment uptime (%)

OEE

Yield impact

PM compliance rate

FDC trigger rate

Soft Skills Strong analytical and problem-solving skills

Ability to work under pressure in a high-volume manufacturing environment

Good communication and teamwork

Proactive and self-driven mindset

Utilizing goggle office & Gemini AI